Morphological Stability of Alloy Thin Films
Date Issued
2002-07-31
Date
2002-07-31
Author(s)
DOI
902212E002162
Abstract
We have studied the morphological stability of semi-
conductor alloy lms with potential to enhance and
enlarge the current spectrum of applications that are
of interest to the semiconductor industry. We have
developed a framework based on the multiscale mod-
eling to perform stability analysis of alloy lm growth
accounting for the joint eect of nonuniform composi-
tion and surface roughness. We have shown that the
critical temperature is obtained by the competition
between the destabilizing in
uence of elastic strain
energy and the stabilizing in
uence of chemical and
surface energies.
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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902212E002162.pdf
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Format
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(MD5):71a83e7304ec3871f39d7dceac5f4831