https://scholars.lib.ntu.edu.tw/handle/123456789/80876
標題: | 微型矽材之諧振式調質薄膜陀螺儀的動力分析與實驗測試 Dynamical analysis and exper imental test of silicon-based resonating proofmass membrane micro-gyroscope |
作者: | 張家歐 | 公開日期: | 31-七月-2003 | 出版社: | 臺北市:國立臺灣大學應用力學研究所 | 摘要: | 於本計劃內提出一微尺寸陀螺儀的構造設計樣本,並對此陀螺儀作動力學上的分析。以 便正確掌握設計參數值。本計劃分兩年進行,其工作內容為: 第一年,(a) 在沒有剛體 旋轉情況下,不考慮調節質量塊,分析長方型(100) 矽晶格薄板的最低兩個振動模態的 頻率與振幅與aspect ratio 的關係。 (b)有剛體旋轉情況下, 因載具轉速W相對於矽板 最低彎曲自然頻率1 w為非常的小,可用微擾法(perturbation method)求第二模態振幅(柯 氏力效應的輸出)的近似解。瞭解aspect ratio(a/b)對輸出信號的增強效益。(c) 在質 量塊的尺寸尚未準確地決定之前,先以正方體為初步考量,以微機電製程作一實體,跟 據我們的2-D 蝕刻理論來研究外凸角偶補償方式及效果,並以量測非旋轉下輸出信號的 頻率與振幅。 we propose a new design of microscope in this project and performing theoretical analysis so as to gaining the proper design parameters of the gyroscopic system. The contents of the first-year task are: (a) Without rotation and with then proofmass removed we analyze the thin silicon plate of (100) lattice plane to find the functional relation between the aspect ratio (i.e., the ratio of the length a to the width b) and the natural frequencies. From this relation we can understand the effect of the aspect ratio on the frequencies. (b) Consider the case where the gyroscope rotates with the vehicle, the angular rate W is small in comparison with the first bending natural frequency 1 w. So we can use the perturbation technique to solve the amplitude of the second mode (i.e., the output mode due to the coriolis foece) in the approximate sense and therefore understand the effect of the aspect ratio on the magnitude of output signal. (c) Before the proper geometry of the proofmass after etching is determined, we consider it to be cubic and investigate the compensation toward the convex corner in order to eliminate the undercut as much as possible. And measure the frequency and amplitude of the second bending mode. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/21672 | 其他識別: | 912212E002034 | Rights: | 國立臺灣大學應用力學研究所 |
顯示於: | 應用力學研究所 |
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912212E002034.pdf | 837 kB | Adobe PDF | 檢視/開啟 |
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