https://scholars.lib.ntu.edu.tw/handle/123456789/80899
標題: | 層狀表面聲波濾波器之分析與製造(Ⅲ) Analysis and Fabrication of Layered Surface-Acoustic-Wave Filter (Ⅲ) |
作者: | 吳政忠 | 關鍵字: | 層狀表面聲波濾波器;有效介電 常數;聲波耦合模態;薄膜反算;layered SAW filter;effective permittivity;COM mode;film property inversion | 公開日期: | 31-七月-2004 | 出版社: | 臺北市:國立臺灣大學應用力學研究所 | 摘要: | 表面聲波元件(Surface Acoustic Wave Device, SAW device)具有高性能、尺寸 小、低成本,且與IC 製程技術相容等優 點,使其在電子工業與通訊系統上佔有很 重要的地位。隨著行動通訊的日新月異及 對於高資料傳輸速度的要求,傳統結構的 表面聲波元件因受限於電極線寬與基底材 料,已不敷使用,而層狀表面聲波元件能 利用不同結構的搭配來提供多重的優點, 以應付日益嚴苛的要求,因此本計畫以三 年時間研製先進層狀表面聲波濾波器,並 建立相關的設計、製程與量測技術。研究 範疇包括壓電層狀介質波傳特性分析、建 立聲波耦合模態理論、表面聲波元件參數 量測、中頻表面聲波振盪器與先進層狀表 面聲波振盪器之研製及薄膜材料性質之反 算等。本計畫的研究內容均依原定進度順 利完成,成果極具學術與應用價值,藉由 本計畫之執行所建立的相關技術除有助於 後續層狀寬頻表面聲波震盪器之研製外, 對應用於射頻辨識系統(RFID)與生化感測 器之表面聲波元件的發展亦極為重要。 With the development of communication technology, there has been a growing interest in the study of SAW filters based on layered structures. By including a high velocity layer between a piezoelectric layer and a substrate, the surface wave velocity can be increased significantly. This results in an increase of the SAW frequency without decreasing the electrode spacing into the sub-micron region. This three-year project is to study the analysis and fabrication of layered SAW filters by both the theoretical and experimental approaches. In the first phase, an IF SAW filter was designed and fabricated. The coupling-of-modes (COM) mode was established to calculate its frequency response. Besides, we adopted the inversion algorithm to determine the practical COM parameters. In the second phase, dispersion relation and frequency response of a layered SAW device were analyzed and discussed based on effective permittivity. In addition, a method for measuring the properties of thin film in the sub-micron range has been developed based on the SAW sensor responses. Finally, a ZnO/sapphire layered SAW was fabricated and tested. The frequency responses of ZnO/sapphire SAW filters were calculated by adapting modified COM model. These calculated results provide useful guidelines for the design of a layered SAW device. The fruitful results of this project will contribute to not only a further study on the layered SAW resonator, but the development of SAW devices applied in RFID and biosensing system. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/21699 | 其他識別: | 922212E002001 | Rights: | 國立臺灣大學應用力學研究所 |
顯示於: | 應用力學研究所 |
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922212E002001.pdf | 326.22 kB | Adobe PDF | 檢視/開啟 |
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