https://scholars.lib.ntu.edu.tw/handle/123456789/80929
標題: | 形狀記憶微泵的模型、特性與製程之開發研究(3/3) | 作者: | 舒貽忠 | 關鍵字: | 形狀記憶合金;形狀記憶效應;擴散器;陽極接合;Shape Memory Alloy;Shape Memory Effect;Diffuser;Anodic Bonding | 公開日期: | 31-七月-2005 | 出版社: | 臺北市:國立臺灣大學應用力學研究所 | 摘要: | 本研究主軸為鈦鎳形狀記憶合金薄膜之特性量測與提出無閥式鈦鎳形狀記 憶合金薄膜微型幫浦之相關製程設計。文中微型幚浦的致動源為鈦鎳薄膜,而擴 散器為微型幫浦流道設計的主體。 鈦鎳薄膜性質量測方面:以掃描式電子顯微鏡(SEM)觀察薄膜破面之柱狀晶 結構,以微差熱掃描分析儀(DSC)量測鈦鎳薄膜之變態點溫度,以能量分散分析 儀(EDS)作鈦鎳薄膜成份之定性分析,以電子微探分析儀(EPMA)作鈦鎳薄膜成份 精確之定量量測,以薄膜加壓設備定性量測薄膜之形狀記憶效應(SME)。 微型幫浦製程方面:針對擴散器設計,並以有限元素法分析鈦鎳薄膜受壓力 後之內部應力值作為設計微幚浦致動腔室之參考,文中亦詳細提出無閥式微型幚 浦製程設計之藍圖,最後配合陽極接合試驗將流道與鈦鎳薄膜致動腔室作相關接 合實驗。 This 3-year project focuses on the measurement of key properties of Ti-Ni thin film and on the design of non-valve shape memory micropump. We have used Ti-Ni thin film as the actuating source and developed a diffuser as the main part of micropump’s flow channels. On the point of view of measurement of properties of Ti-Ni film, we have adopted the Scanning Electron Microscope (SEM) to observe the cross section of Ti-Ni thin film, the Differential Scanning Calorimeter (DSC) to measure the transformation temperature of Ti-Ni thin film, the EDS to qualatively measure the composition analysis of Ti-Ni thin film, Electron Probe X-ray Microanalysis (EPMA) to measure precisely the composition of Ti-Ni thin film. In addition, on the point of view of mechanical testings, we have designed the clamp apparatus for Ti-Ni thin film to qualitatively measure the sahpe-memory effect of Ti-Ni films and foils under pressure. Regards to the MEMS process of micropump, we have designed different components of diffusers for the flow channels. In addition, we have used the conventional FEM solver to analyze the internal stress of the thin film under different pressure. The design criterion has been brought up for the development of the non-valve micropump in detail. Finally, we have used the technique of anodic bonding to assemble the flow channels and the actuation chamber together. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/21731 | 其他識別: | 932212E002004 | Rights: | 國立臺灣大學應用力學研究所 |
顯示於: | 應用力學研究所 |
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932212E002004.pdf | 2.3 MB | Adobe PDF | 檢視/開啟 |
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