Design and Implementation of An Integration Platform of Ellipsometry and Interferometry Measurements
Date Issued
2012
Date
2012
Author(s)
Jan, Chia-Ming
Abstract
Based on previous studies and works on the development of AVIDTM (Advanced Vibrometer/Interferometry Device) and OBMorph (Opto-BioMorphin) systems, a newly developed interferometric ellipsometer integrated with a quadrature interferometer was designed and constructed for ellipsometry measurement. By using one set of orthogonal signals, the circularly polarized ellipsometer incorporated prism-based coupling and paraboloidal mirror based varying incident angle subsystem can undertake angular interrogation and phase interrogation simultaneously. Combining surface plasmon resonance effect, the sensitivity of the measuring system efficiently increases upon a p-s common path configuration by means of the different response versus the polarization variation. By adopting fault tolerance algorithm (FTA) to normalize the orthogonal signals, the possibility of using the quadrature signal to retrieve ellipsometric parameters and the remap of Lissajous curve to modify the measured outputs were verified experimentally. The FTA allows our implementations to circumvent the misalignment-induced error signals caused by mechanical vibration and to simplify the complicated recalibrations associated with conventional ellipsometry. On the basis of a paraboloidal and on companion spherical mirrors, the precision of angular control subsystem achieves 10^(-3) order when ranged from 32 to 70 deg. The significant features of our system are miniaturization, high sensitivity, high resolution (to the fourth digit order), wide dynamic range, and real-time monitoring in order to measure the thin-film structure and biomolecular interactions fast and precisely.
The phase detection on different concentration of glucose solution and alcohol solution represented its sensitivity and resolution over 8.2×10^6(1⁄RIU) and 1.22×10^(-7)(RIU), respectively. Meanwhile, the specific and non-specific reactions such as CRP and anti-CRP and tuberculosis inhibitor-DHFR to protein were measured and verified experimentally. Besides, this dissertation advanced an efficient way to extend the dynamic range upon angular interrogation and the modulation of equivalent index change on ITO (indium-tin-oxide) film layer caused by the change of surface plasmon coupling as the externally DC and AC voltage applied. Our experimental data showed three times extending of dynamic range was reasonably practicable while compared with the traditional phase detection. The fourth digit order variations of equivalent indices on ITO can be observed and be enough to overcome the lack of dynamic range for point-wise measurement.
In this dissertation, we advanced and designed a new implementation for interferometry and ellipsometry to enable fast and precise measurements under solid or liquid surroundings. The long-term goal of this work will be on real-time monitoring of thin-film manufactures and clinically biomedical diagnosis
Subjects
Quadrature interferometer
Ellipsometry
Surface plasmon resonance
Optical metrology
SDGs
Type
thesis
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