Mist Cooling of High Heat Flux Surface with Versatile Micro Jet Array
Date Issued
2005-07-31
Date
2005-07-31
Author(s)
翁宗賢
DOI
932212E002038
Abstract
In the present project, micro heat pipe
chips were fabricated using surface machining
and bulk machining of MEMS manufacturing.
The channel of micro heat pipe is
150μm in width, and 15mm in length. A
micro heater was deposited on a glass wafer
to simulate hot spot of the micro heat pipe, in
associated with four platinum thin-film resistors
for temperature detecting along the micro
channel. Three micro heat-pipe chips were
studied. Test data showed that the micro
heat pipes can work properly when 1W was
applied to the heaters. The gravity-assistant
fluid feedback and heat sink were used to improve
the performance of the micro heat pipes.
Both devices demonstrated workable prototype
for minute heat dissipation.
Subjects
micro heat pipe
micro
heater
heater
in-situ temperature measurement
MEMS fabrication
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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932212E002038.pdf
Size
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Format
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