https://scholars.lib.ntu.edu.tw/handle/123456789/81515
Title: | A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution | Authors: | Chang, Pei-Zen Yang, Lung-Jieh |
Issue Date: | Sep-1998 | Journal Issue: | 8 | Start page/Pages: | 182-187 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/198053 |
Appears in Collections: | 應用力學研究所 |
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