Theoretical Analysis on Dynamic Characteristics of Micromechanical Components in the Fluid Environment and Application of Atomic Force Microscopy
|Keywords:||振動;流固耦合;微系統動態特性;原子力顯微鏡;vibration;atomic force microscope;fluid-structure interaction||Issue Date:||2010||Abstract:||
This paper mainly investigates the dynamic characteristics of the beam structure located at the neighborhood of the wall inside the chamber filled with different fluids. Firstly, by establishing the relation between the Reynolds equation and Euler beam equation, it is derived for two analytic approaches: Curve fitting and Green''s function method, so that specific dynamic characteristics of the entire system involving the resonant frequency, frequency shift, and damping ratio can be acquired. Compared with the differences between the two analytic methods by a cross checking of experimental data and numerical simulation, the expected vibration behavior of the entire system evaluated by Curve fitting method has the higher accuracy.
Secondly, based on calculated dynamic characteristics including the resonant frequency, frequency shift, and damping ratio, corresponding to the frequency response of single degree of freedom system, effective mass, damping and stiffness can be evaluated for the beam structure connecting with the still fluid and the chamber wall, and the coupling dynamic reaction can be comprehended by discussing these extended physical parameters.
Finally, the preceding analytic procedure is used to demonstrate the limitation on a tip length of a probe of a non-contact mode atomic force microscope coupled with the fluid environment and the measured samples, and provide the suggestion of the range in the design of probe tips.
|Appears in Collections:||應用力學研究所|
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