A Wide-G Range Silicon Piezoresistive Accelerometer
Journal
Journal of the Chinese Institute of Engineers
Journal Volume
18
Journal Issue
6
Pages
873-878
Date Issued
1995
Author(s)
Abstract
Abstract In this paper, a high‐performance silicon piezoresistive accelerometer, fabricated by bulk micromachining with an almost linear I/O (acceleration / voltage) relationship from 0 to 90g over a 400Hz bandwidth suitable for vehicle's safety system, is described. This accelerometer is composed of two glass cover caps and a Si sensing structure. The size of the sensing structure is 3.3mm × 2.05 mm × 0.15 mm. It consisted of a “mass”, a “frame”, and 4 thin beam “bridges”. The sensitivity of the accelerometer was found to be 9.6 × 10‐8 (sec2/m) and a gauge factor of 18 was deduced from this value.
SDGs
Type
journal article