https://scholars.lib.ntu.edu.tw/handle/123456789/98783
Title: | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | Authors: | Guo, Ruey-Shan Chen, Argon Liu, Cheewee Lin, A. ARGON CHEN |
Issue Date: | Oct-1999 | Start page/Pages: | 429-432 | Source: | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/352896 http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908561605/1/00808828.pdf |
DOI: | 10.1109/ISSM.1999.808828 |
Appears in Collections: | 工商管理學系 |
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00808828.pdf | 300.95 kB | Adobe PDF | View/Open |
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