DC 欄位 | 值 | 語言 |
dc.contributor | Dept. of Ind. Manage., National Taiwan Univ. | en |
dc.contributor.author | Guo, Ruey-Shan | en_US |
dc.contributor.author | Chen, Argon | en_US |
dc.contributor.author | Liu, Cheewee | en_US |
dc.contributor.author | Lin, A. | en_US |
dc.contributor.author | ARGON CHEN | en_US |
dc.creator | Guo, Ruey-Shan; Chen, Argon; Liu, Cheewee; Lin, A.; Lan, M. | - |
dc.date | 1999-10 | en |
dc.date.accessioned | 2007-04-19T01:46:04Z | - |
dc.date.accessioned | 2018-06-29T08:49:14Z | - |
dc.date.available | 2007-04-19T01:46:04Z | - |
dc.date.available | 2018-06-29T08:49:14Z | - |
dc.date.issued | 1999-10 | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/352896 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908561605/1/00808828.pdf | - |
dc.format | application/pdf | en |
dc.format.extent | 308168 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en-US | en |
dc.language.iso | en_US | - |
dc.relation | Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on | en |
dc.relation.ispartof | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference | - |
dc.title | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | en |
dc.type | conference paper | en |
dc.identifier.doi | 10.1109/ISSM.1999.808828 | - |
dc.identifier.scopus | 2-s2.0-0033328942 | - |
item.fulltext | with fulltext | - |
item.grantfulltext | open | - |
dc.relation.pages | 429-432 | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041908561605/1/00808828.pdf | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | open | - |
item.cerifentitytype | Publications | - |
item.fulltext | with fulltext | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.dept | Business Administration | - |
crisitem.author.dept | Taidah Entreprenuership Center | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Management | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工商管理學系
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