DC 欄位 | 值 | 語言 |
dc.contributor | Dept. of Ind. Manage. & Bus. Adm., National Taiwan Univ. | en |
dc.contributor.author | Guo, R.S. | en_US |
dc.contributor.author | Chen, A. | en_US |
dc.contributor.author | Tseng, C.L. | en_US |
dc.contributor.author | Fong, I.K. | en_US |
dc.contributor.author | Yang, A. | en_US |
dc.contributor.author | Lee, C.L. | en_US |
dc.contributor.author | Wu, C.H. | en_US |
dc.contributor.author | Lin, S. | en_US |
dc.contributor.author | Huang, S.J. | en_US |
dc.contributor.author | Lee, Y.C. | en_US |
dc.contributor.author | Chang, S.G. | en_US |
dc.contributor.author | RUEY-SHAN GUO | en_US |
dc.contributor.author | ARGON CHEN | en_US |
dc.creator | Guo, R.S.; Chen, A.; Tseng, C.L.; Fong, I.K.; Yang, A.; Lee, C.L.; Wu, C.H.; Lin, S.; Huang, S.J.; Lee, Y.C.; Chang, S.G.; Lee, M.Y. | en |
dc.date | 1998-06 | en |
dc.date.accessioned | 2007-04-19T02:09:15Z | - |
dc.date.accessioned | 2018-06-29T08:49:18Z | - |
dc.date.available | 2007-04-19T02:09:15Z | - |
dc.date.available | 2018-06-29T08:49:18Z | - |
dc.date.issued | 1998-06 | - |
dc.identifier | N/A | en |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021760 | - |
dc.format | application/pdf | en |
dc.format.extent | 1771635 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en-US | en |
dc.language.iso | en_US | - |
dc.relation | Semiconductor Manufacturing Technology Workshop, 1998 | en |
dc.relation.ispartof | Semiconductor Manufacturing Technology Workshop | en_US |
dc.title | A real-time equipment monitoring and fault detection system | en |
dc.type | other | en |
dc.identifier.doi | 10.1109/SMTW.1998.722666 | en |
dc.relation.pages | - | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021760/1/00722666.pdf | - |
item.fulltext | with fulltext | - |
item.openairetype | other | - |
item.languageiso639-1 | en_US | - |
item.openairecristype | http://purl.org/coar/resource_type/c_1843 | - |
item.grantfulltext | open | - |
item.cerifentitytype | Products | - |
crisitem.author.dept | Internal Medicine-NTUHHC | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.dept | Business Administration | - |
crisitem.author.dept | Taidah Entreprenuership Center | - |
crisitem.author.dept | Industrial Engineering | - |
crisitem.author.orcid | 0000-0001-6246-8803 | - |
crisitem.author.parentorg | NTU Hsin-Chu Hospital | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Management | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工商管理學系
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