https://scholars.lib.ntu.edu.tw/handle/123456789/99557| Title: | Age-based double EWMA controller and its application to CMP processes | Authors: | Chen, Argon Guo, R.-S. |
Issue Date: | Feb-2001 | Journal Volume: | 14 | Journal Issue: | 1 | Start page/Pages: | 11-19 | Source: | IEEE Transactions on Semiconductor Manufacturing | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/191622 |
| Appears in Collections: | 工商管理學系 |
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