Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping

Chien, Jui-FenJui-FenChienChen, Ching-HsiangChing-HsiangChenShyue, Jing-JongJing-JongShyueChen, Miin-JangMiin-JangChen2012-10-242018-06-282012-10-242018-06-282012http://ntur.lib.ntu.edu.tw//handle/246246/243569en-USLocal Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Dopingjournal article10.1021/am300551yhttp://ntur.lib.ntu.edu.tw/bitstream/246246/243569/-1/09.pdf