Lin, M.-F.M.-F.LinChang, C.-P.C.-P.ChangChang, K.-L.K.-L.ChangLee, W.-J.W.-J.LeeWu, J.-L.J.-L.WuChen, P.-H.P.-H.ChenPO-HAN CHEN2021-02-042021-02-042020Lin, M.-F.;Chang, C.-P.;Chang, K.-L.;Lee, W.-J.;Wu, J.-L.;Chen, P.-H.https://www.scopus.com/inward/record.url?eid=2-s2.0-85083452159&partnerID=40&md5=7979d19419ccd0d18bb5b96a959ddcf0https://scholars.lib.ntu.edu.tw/handle/123456789/547332An innovative method for utilizing synthetic calcium fluoride (CaF2), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H2SO4) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via the reaction of synthetic CaF2 and waste H2SO4. The impact of H2SO4 concentration and total volume (H2SO4 + H2O)/CaF2 ratio, drying temperature of synthetic CaF2 on HF productivity were investigated in this study. HF yield increased with increasing H2SO4 concentration and total volume/CaF2 ratio under room temperature. In addition, the HF produced in the reactions involving the 105 oC-dried synthetic CaF2 were higher than the 600 oC-dried synthetic CaF2 ones. The study will not only find uses for this semiconductor wastes but also provide a greener alternative to the current commercial production of HF. © 2020 Institute of Physics Publishing. All rights reserved.HF productivity; Synthetic CaF2; Waste sulfuric acid[SDGs]SDG6[SDGs]SDG7Calcium fluoride; Energy conservation; Environmental technology; Fluorine compounds; Fluorspar; Hydrofluoric acid; Sulfuric acid; Temperature; Commercial productions; Drying temperature; Innovative method; Low temperatures; Semiconductor wastewater; Low temperature productionconference paper10.1088/1755-1315/463/1/0120982-s2.0-85083452159