Composition control of r.f.-sputtered Ni2MnGa thin films using optical emission spectroscopy

Wu, S.-K.S.-K.WuTseng, K.-H.K.-H.TsengSHYI-KAAN WU2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0036577895&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/296860Composition control of r.f.-sputtered Ni2MnGa thin films using optical emission spectroscopyjournal article