CMOS-based tactile sensors using oxide as sacrificial layer

Lin, Y.-C.Y.-C.LinHsieh, C.-J.C.-J.HsiehSun, C.-T.C.-T.SunLiou, J.-C.J.-C.LiouWEI-CHENG TIAN2020-06-112020-06-112013https://scholars.lib.ntu.edu.tw/handle/123456789/497759CMOS-based tactile sensors using oxide as sacrificial layerconference paper10.1109/Transducers.2013.66271622-s2.0-84891713920https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891713920&doi=10.1109%2fTransducers.2013.6627162&partnerID=40&md5=65419d51675485dbf95f2a59b7414f15