An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

Hung, S.H.S.H.HungHsieh, H.-T.H.-T.HsiehGUO-DUNG JOHN SU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-47249129342&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340731[SDGs]SDG7An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuationjournal article10.1088/0960-1317/18/7/075003