Chuang, W.-C.W.-C.ChuangLee, H.-L.H.-L.LeeChang, P.-Z.P.-Z.ChangHu, Y.-C.Y.-C.HuPEI-ZEN CHANG2020-04-282020-04-28201014248220https://scholars.lib.ntu.edu.tw/handle/123456789/486827Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. © 2010 by the authors.Electromechanics; Electrostatics; MEMS; Pull-in voltageDynamic characteristic analysis; Electro-mechanics; Electrostatic MEMS; Energy domain; Numerical modeling method; Physical model; Pull-in voltage; Working state; Electromechanical devices; Electrostatics; MEMS; Electrostatic devices; biological model; equipment design; human; instrumentation; methodology; microelectromechanical system; microtechnology; review; static electricity; theoretical model; Equipment Design; Humans; Micro-Electrical-Mechanical Systems; Microtechnology; Models, Biological; Models, Theoretical; Static Electricityreview10.3390/s100606149222197072-s2.0-77954773877https://www.scopus.com/inward/record.uri?eid=2-s2.0-77954773877&doi=10.3390%2fs100606149&partnerID=40&md5=47c007b3aee58c127d4c856690504fb9