Double-patterning aware DSA template guided cut redistribution for advanced 1-D gridded designs

Lin, Z.-W.Z.-W.LinYAO-WEN CHANG2018-09-102018-09-102016http://www.scopus.com/inward/record.url?eid=2-s2.0-84964821968&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/396597[SDGs]SDG9[SDGs]SDG16Double-patterning aware DSA template guided cut redistribution for advanced 1-D gridded designsconference paper10.1145/2872334.28723502-s2.0-84964821968