Dept. of Electr. Eng., National Taiwan Univ.Chang, Shi-ChungShi-ChungChangLiu, Chung-YangChung-YangLiuHu, Ming-DerMing-DerHuWu, Hsin-YiHsin-YiWuWu, Hsin-ChenHsin-ChenWuChao, Cheng-LinCheng-LinChaoChen, Ren-ChengRen-ChengChen2007-04-192018-07-062007-04-192018-07-061997-10http://ntur.lib.ntu.edu.tw//handle/246246/2007041910031874application/pdf298236 bytesapplication/pdfen-USPHOMAG: a photolithography machine allocation gamejournal article10.1109/ISSM.1997.664607http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910031874/1/00664607.pdf