Formation of Nano-Size SiO2 Thin Film on an Aluminum Plate with Hexamethyldisilazane (HMDSA) and Hexamethyldisiloxane (HMDSO)

Ma, H. K.H. K.MaZhao, E.E.ZhaoYeh, C. L.C. L.YehChung, K. M.K. M.Chung2008-11-122018-06-282008-11-122018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/86498en-USFormation of Nano-Size SiO2 Thin Film on an Aluminum Plate with Hexamethyldisilazane (HMDSA) and Hexamethyldisiloxane (HMDSO)journal article