Application of soft landing to the process control of chemical mechanical polishing

Chiu, Jian-BinJian-BinChiuYu, Cheng-ChingCheng-ChingYuShen, Shih-HaurShih-HaurShen2008-12-242018-06-282008-12-242018-06-282003http://ntur.lib.ntu.edu.tw//handle/246246/93200application/pdf1129176 bytesapplication/pdfen-USApplication of soft landing to the process control of chemical mechanical polishingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/93200/1/36.pdf