Study of a Noncontact Type Micro-CMM with Arch-bridge and Nanopositioning Stage

Fan, K. C.K. C.FanFei, Y. T.Y. T.FeiYu, X. F.X. F.YuWang, W. L.W. L.WangChen Y. J.2010-09-072018-06-282010-09-072018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/200117en-USStudy of a Noncontact Type Micro-CMM with Arch-bridge and Nanopositioning Stagejournal article