Oxidation of Silicon Nitride Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Liao, W. S.W. S.LiaoLin, C. H.C. H.Lin李嗣涔Lee, Si-ChenSi-ChenLee2009-02-042018-07-062009-02-042018-07-061995http://ntur.lib.ntu.edu.tw//handle/246246/120795en-USOxidation of Silicon Nitride Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperaturejournal article