Low-dielectric constant bisbenzo(cyclobutene) and fluorinated poly(arylene)ether films as bottom anti-reflective coating layers for ArF lithography

Chen, H.L.H.L.ChenChu, T.C.T.C.ChuLi, M.Y.M.Y.LiKo, F.H.F.H.KoCheng, H.C.H.C.ChengHuang, T.Y.T.Y.HuangHSUEN-LI CHEN2020-05-122020-05-122001https://scholars.lib.ntu.edu.tw/handle/123456789/491396Low-dielectric constant bisbenzo(cyclobutene) and fluorinated poly(arylene)ether films as bottom anti-reflective coating layers for ArF lithographyjournal article10.1116/1.14215522-s2.0-0035519497https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035519497&doi=10.1116%2f1.1421552&partnerID=40&md5=1dc228a2cda1450600f234d4261179cf