Conductive atomic force microscopy application for semiconductor failure analysis in advanced nanometer process

Lin, K.K.LinZhang, H.H.ZhangSHEY-SHI LU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33847657448&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/324102Conductive atomic force microscopy application for semiconductor failure analysis in advanced nanometer processconference paper