2019-06-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/693745摘要：本計畫將發展新的3D 感測模組，協助合作公司嘉澤端子投入資源，尋求3D感測商 機，及創造新的應用機會。嘉澤為高頻傳輸端子，高頻光通訊連結介面領導廠商。 子公司嘉基更是以高頻光傳輸線為核心產品。這些光收發傳輸需要VCSEL/DFB雷 射晶片等，因此希望將既有VCSEL晶片需求延伸，應用至其他領域如光感測模組 等。 我們將以兩年的時間，開發創新的3D 感測模組，以陣列式高功率覆晶VCSEL當光 源，陣列分為數區，每區30-50個VCSEL有不同排列，此陣列的每個VCSEL上覆 蓋晶圓級透鏡。藉不同時間各區所投射至目標物的30-50光點之型變做模糊運算 ，搭配2D影像疊加，可將目的物的輪廓，反光區塊等辨識出來。本計畫有以下的 創新處: (1) VCSEL分批分區投射光點，利用演算法將CCD的2D影 像與投射光點之型變結合，收集景深資訊，架構出立體的影像 (2)分批投射光點 ，可以辦別並排除高反射景物及邊界造成的錯誤資訊。提升3D模組偵測精確率 (3) 製作覆晶VCSEL 陣列，提升散熱能力，將VCSEL 操作功率提升至4W，可偵測 4m外的目標物 (4) 藉由半導體製程，本感測器模組的體積遠小於目前商用或專利 紀載之模組。 本計畫的目標場域，系提供工業製造之輔助監控，本3D感測器可用於3C產品精密 加工的除錯識別，模具沖壓製程等程序監控，為生產線提供更精準之辨識能力，在 追求連續作業動作要快又要精準的前提下，藉由3D感測做偵錯。<br> Abstract: We will develop a new 3D sensing module in this proposal to help Lotes corp. explore business opportunities and new applications. Lotes corp. is the leading supplier of high-speed connectors and high-frequency optical interconnecters. Its subsidiary, Lintes Tech, is especially focused on optical connectors. They have strong demand on laser diodes, such as VCSELs and DFBs; thus are hoping to extend the applications of laser diodes to different fields. We plan to spend two years to develop a novel 3D sensing module. VCSEL arrays are the light source. The arrays are composed of several zones, each with 30-50 VCSEL diodes. On top of each individual diode, wafer level optics (lens) will be fabricated using standard semiconductor process. The 3D contour is realized by overlapping the projected laser spots with the 2D CCD infrared image. The contour, deflection, reflection will be determined by software algorithm. There are several novelties in this proposal: (1) VCSELs are projected in sequence from different zones. The VCSEL arrangement of each zone is different. The distortion of projected spots will be collected to determine field of depth. (2) The projection from different zones and arrangement will improve the detection accuracy, and meanwhile exclude blind spots such as reflection and edge contours. (3) Flip-chip VCSEL arrays will be fabricated to improve operating optical power to 4W, thus the working distance will be extended to 4m (4) The VCSEL array and WLO will be integrated so that miniature 3D sensing module can be achieved. The target application area of the 3D sensing module is to provide precise monitoring during industrial manufacturing. It can be used for precision machining, progressive stamping, etc, providing continuous, fast, yet precise recognition and debugs.三度空間感測器垂直共振腔面射型雷射3D sensingVertical cavity surface emitting laser