Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages

Fan, Kuang-ChaoKuang-ChaoFanFei, YetaiYetaiFeiYu, XiaofenXiaofenYuWang, WeiliWeiliWangChen, YejinYejinChen2008-11-182018-06-282008-11-182018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/86574application/pdf1553741 bytesapplication/pdfen-USStudy of a noncontact type micro-CMM with arch-bridge and nanopositioning stagesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86574/1/36.pdf