A comparative study of high resolution transmission electron microscopy, atomic force microscopy and infrared spectroscopy for GaN thin films grown on sapphire by metalorganic chemical vapor deposition

Feng, Zhe ChuanZhe ChuanFengLi, KunKunLiHou, Yun TianYun TianHouZhao, JieJieZhaoLu, W.W.LuCollins, W.E.W.E.Collins2009-03-112018-07-062009-03-112018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/144201application/pdf444667 bytesapplication/pdfen-USA comparative study of high resolution transmission electron microscopy, atomic force microscopy and infrared spectroscopy for GaN thin films grown on sapphire by metalorganic chemical vapor depositionjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/144201/1/19.pdf