Deposition of osmium thin films using pyrazolate complexes as CVD source reagents

Chi, YunYunChiYu, Huan-LiHuan-LiYuChing, Wei-LiWei-LiChingLiu, Chao-ShiuanChao-ShiuanLiuChen, Yao-LunYao-LunChenChou, Tsung-YiTsung-YiChouPeng, Shie-MingShie-MingPengLee, Gene-HsiangGene-HsiangLee2009-09-282018-07-102009-09-282018-07-102002http://ntur.lib.ntu.edu.tw//handle/246246/168466application/pdf435924 bytesapplication/pdfen-USDeposition of osmium thin films using pyrazolate complexes as CVD source reagentsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/168466/1/297.pdf