Eight-phase-level diffractive microlens for beam splitting using LIGA-lIke Process

Yang, J.-J.J.-J.YangLiao, Y.-S.Y.-S.LiaoChen, C.-F.C.-F.ChenYUNN-SHIUAN LIAO2020-01-132020-01-132006https://scholars.lib.ntu.edu.tw/handle/123456789/448664Eight-phase-level diffractive microlens for beam splitting using LIGA-lIke Processjournal article10.1143/JJAP.45.28172-s2.0-33645711641https://www.scopus.com/inward/record.uri?eid=2-s2.0-33645711641&doi=10.1143%2fJJAP.45.2817&partnerID=40&md5=4331efd98e65b96f708e45078de14dc6