Development of an aerosol PZT actuator for a scanner system

Chen, P.-J.P.-J.ChenLin, T.-K.T.-K.LinWu, W.-J.W.-J.WuSchipf, D.D.SchipfWang, W.-C.W.-C.WangWEN-JONG WU2020-01-172020-01-172017https://scholars.lib.ntu.edu.tw/handle/123456789/451964[SDGs]SDG3[SDGs]SDG7Development of an aerosol PZT actuator for a scanner systemconference paper10.1117/12.22599692-s2.0-85020499129https://www.scopus.com/inward/record.uri?eid=2-s2.0-85020499129&doi=10.1117%2f12.2259969&partnerID=40&md5=a7db83847240c395ee2e4b4c8f46b0e2