Chou, Yon-ChunYon-ChunChouWu, Chuan-ShunChuan-ShunWu2009-02-112018-06-292009-02-112018-06-292002http://ntur.lib.ntu.edu.tw//handle/246246/127933application/pdf251565 bytesapplication/pdfen-USEconomic Analysis and Optimization of Tool Portfolio in Semiconductor Manufacturingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/127933/1/03.pdf