Atomic layer etchings of transition metal dichalcogenides with post healing procedures: Equivalent selective etching of 2D crystal hetero-structures

Chen, K.-C.K.-C.ChenChu, T.-W.T.-W.ChuWu, C.-R.C.-R.WuLee, S.-C.S.-C.LeeLin, S.-Y.S.-Y.LinSI-CHEN LEE2020-06-112020-06-112017https://scholars.lib.ntu.edu.tw/handle/123456789/498821Atomic layer etchings of transition metal dichalcogenides with post healing procedures: Equivalent selective etching of 2D crystal hetero-structuresjournal article10.1088/2053-1583/aa75a72-s2.0-85029228509https://www.scopus.com/inward/record.uri?eid=2-s2.0-85029228509&doi=10.1088%2f2053-1583%2faa75a7&partnerID=40&md5=de4940775e174614cd4d40c66ed558cf