Flip-chip bonded MEMS capacitor applied on tuning superconductive resonator

WEN-PIN SHIHChen, Yi-JieYi-JieChenKao, Cheng-KaiCheng-KaiKaoShih, Wen-PinWen-PinShihChung, Sheng-YuanSheng-YuanChungChang, Pei-ZenPei-ZenChang2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-50149098813&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/3393091887422 bytesapplication/pdf[SDGs]SDG7Flip-chip bonded MEMS capacitor applied on tuning superconductive resonatorconference paper10.1109/MEMSYS.2008.44438282-s2.0-50149098813