Huang W.-L.Kuo F.-C.Chou S.-C.Yen J.-Y.Tsai I.-H.Chung T.-T.Hung C.-W.JIA-YUSH YEN2019-10-222019-10-22201702683768https://www.scopus.com/inward/record.uri?eid=2-s2.0-84987618985&doi=10.1007%2fs00170-016-9355-0&partnerID=40&md5=508a69852a4524a70188cd1281be10cfhttps://scholars.lib.ntu.edu.tw/handle/123456789/427120[SDGs]SDG3[SDGs]SDG7High-performance and high-precision servo control of a single-deck dual-axis PMLSM stagejournal article10.1007/s00170-016-9355-02-s2.0-84987618985WOS:000398997800072