Integrated design of a planar Maglev system for micro positioning

Chen, M.-Y.M.-Y.ChenTsai, C.-F.C.-F.TsaiHuang, H.-H.H.-H.HuangFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-23944509259&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316446Integrated design of a planar Maglev system for micro positioningconference paper