Synthesis and Characterization of Fluorinated Aminoalkoxide and Iminoalkoxide Gallium Complexes: Application in Chemical Vapor Deposition of Ga2O3 Thin Films

Chi, YunYunChiChou, Tsung-YiTsung-YiChouWang, Yi-JenYi-JenWangHuang, Shu-FenShu-FenHuangCarty, Arthur J.Arthur J.CartyScoles, LudmilaLudmilaScolesUdachin, Konstantin A.Konstantin A.UdachinPeng, Shie-MingShie-MingPengLee, Gene-HsiangGene-HsiangLee2009-09-282018-07-102009-09-282018-07-102004http://ntur.lib.ntu.edu.tw//handle/246246/168195application/pdf244768 bytesapplication/pdfen-USSynthesis and Characterization of Fluorinated Aminoalkoxide and Iminoalkoxide Gallium Complexes: Application in Chemical Vapor Deposition of Ga2O3 Thin Filmsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/168195/1/381.pdf