Family-based Scheduling Rule of a Sequence Dependent Wafer Fabrication System

Chern, C.C.C.C.ChernLiu, Y.L.Y.L.Liu2008-10-222018-06-292008-10-222018-06-292003http://ntur.lib.ntu.edu.tw//handle/246246/84998application/pdf609529 bytesapplication/pdfen-USFamily-based Scheduling Rule of a Sequence Dependent Wafer Fabrication Systemhttp://ntur.lib.ntu.edu.tw/bitstream/246246/84998/1/4.pdf