傅立成臺灣大學：電機工程學研究所林孟滸Lin, Meng-HuMeng-HuLin2007-11-262018-07-062007-11-262018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/53417本論文研究之目的是設計並實現一輕敲式原子力顯微鏡 (tapping-mode atomic force microscope)，其中使用光學讀取頭作為探針在垂直方向上的位移量測系統。此光學讀取頭系統取代傳統光槓桿原理所需的複雜光路系統。此外，使用一個由壓電致動器 (piezo-actuator) 所構成的慣性馬達 (inertial motor) 作為待測樣品的載送趨近系統，同時作為垂直方向的掃描致動器。如此整體系統的硬體架構得以最小化，以避免因熱漲冷縮所引起的量測誤差。 為了實現進階控制器設計，本論文提出一整合探針-樣品作用關係與壓電致動器之輕敲式原子力顯微鏡數學模型。由於探針的振幅是唯一可得的資訊，我們使用迴路傳輸回復 (loop transfer recovery, LTR) 狀態觀察器來估測狀態資訊，並設計以此觀察器為基礎的可變結構控制器 (variable structure controller) 以增進系統的掃描性能與強健性。實驗結果顯示，本論文所設計之輕敲式原子力顯微鏡可以達到垂直方向正負5奈米之掃描精確度，以及每秒4條線之掃描速度。A compact tapping-mode atomic force microscope (AFM) utilizing an optical pickup system for measuring the deflection of the probe is presented. An optical pickup head of commercial digital versatile disc read only memory (DVD-ROM) drive is applied in the measuring system. This DVD pickup replaces the quadrant photodiode and complex light path system of traditional optical-lever technique. In addition, an inertial motor composed by a piezo-actuator is used as the sample approaching mechanism and the scanner in the vertical direction. Thus, the volume of hardware structure is decreased, and the sensing variance due to temperature change will be minimized. In order to perform advanced controller design, we propose an integrated system model including the tip-sample interaction and dynamics of the piezo-actuator for the tapping-mode AFM. Because the amplitude of the oscillating probe is the only available information, we use a loop transfer recovery (LTR) observer to estimate system states. Then, the observed-based variable structure controller is designed for enhancing system robustness and performance. From the provided experiment results, satisfactory performances of the proposed AFM system have been successfully demonstrated. The vertical scanning resolution is ±5nm and scanning speed is 4 lines per second.摘要 I Abstract II Table of Contents III List of Figures V List of Tables VIII Chapter 1 Introduction 1 1.1 Motivation and Goal 1 1.2 Survey on AFM Systems 2 1.2.1 Operation Mode 3 1.2.2 Actuating System 6 1.2.3 Measuring System 7 1.3 Contribution 9 1.4 Thesis Organization 10 Chapter 2 Preliminaries 11 2.1 Basic Theories of Interaction Forces 11 2.1.1 Van der Waals Interaction Principle 11 2.1.2 Dejarguin-Muller-Toporov Theory 18 2.2 Properties of Piezoelectric Materials 19 2.2.1 Hysteresis Phenomenon 19 2.2.2 Creep Phenomenon 24 2.3 Operating Principle of DVD Pickup System 25 2.3.1 Sensing Methodology 26 2.3.2 Focusing and Tracking Actuators 27 Chapter 3 System Design 29 3.1 Design Concepts 29 3.1.1 High Scanning Accuracy 30 3.1.2 High Scanning Speed 30 3.1.3 Compact Structure 31 3.1.4 Cost Effectiveness 31 3.2 Measuring System 32 3.2.1 Probe 33 3.2.2 DVD Pickup System 34 3.3 Sample Approaching Mechanism 35 3.3.1 Inertial Sliding Mechanism 35 3.3.2 Inertial Motor 37 3.4 Scanner Design 38 3.4.1 Moving Sample Type 38 3.5 Integrated AFM System 39 Chapter 4 Modeling and System Identification 41 4.1 Dynamics 41 4.1.1 Tip-Sample Interaction 41 4.1.2 Dynamics of Stacked Piezo-actuator 49 4.2 System Identification 52 Chapter 5 Controller Design 55 5.1 LTR Observer Design 56 5.1.1 Observer Formulation 57 5.1.2 Stability Analysis 58 5.2 Observed-Based Variable Structure Controller Design 60 5.2.1 Stability Analysis 61 5.3 Numerical Simulation 65 Chapter 6 Experiment 69 6.1 Hardware Setup 69 6.2 Experiment Result 72 6.2.1 Frequency Response of the Cantilever 72 6.2.2 Resolution of DVD Pickup System 73 6.2.3 Scanning Result of Test Grating 74 Chapter 7 Conclusion 81 Reference 833796432 bytesapplication/pdfen-US輕敲式原子力顯微鏡光學讀取頭系統可變結構控制器Tapping-mode atomic force microscopyOptical pickup headVariable structure controllerthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/53417/1/ntu-95-R93921005-1.pdf