2017-02-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/685940摘要：發展先進自動化光學檢測(AOI)製程檢測基礎設備與關鍵技術，已成為我國高科技產業亟需全&#63882;發展的重點，此為本產學小聯盟計畫之技術與人才培育發展的重點方向。計畫主持人過去專攻於自動化光學檢測技術的研發深耕工作，其研究團隊經過多年技術研發的精進與經驗的不斷累積，已成功發展多型創新式白光干涉量測、彩色共焦顯微量測以及莫瑞投光三 維形貌量測等精密光學量測系統與技術，其研發成果目前已獲得國內外超過50 項發明專利，並已獲國內廠商技術轉移授權者共有20 項專利，已順利完成11 次技轉給國內9 個相關領域設備廠商，實際應用於國內自動化光學檢測線上製程檢測技能之提升。為了聚焦在我國目前相當重要的先進自動化光學檢測設備產業之發展上，尤其是半導體產業與精密機械產業(航 太產業與精密工具機)，本計畫擬將針對學校實驗室已建立現有之自動化光學檢測技術與智慧財產，積極協助技術產業聯盟之合作廠商的產學合作或技術轉移，以利致&#63882;於研發線上自動光學檢測技術及設備，並在國內建立一個由學界實驗室(Labs)、AOI 設備製造商 (Makers)以及設備使用者(Users)三合一的半導體AOI 技術聯盟，將專精於先進自動化光學檢測產業及其它精密工業之AOI 線上設備需求之研發上，擬推廣的技術重點將包含三類：(一)先進線上白光干涉檢測技術、(二)線上彩色共焦光學顯微檢測、(三)高速莫瑞投光三維形貌檢測技術。同時，本計畫將透過定期舉辦專家技術講座、聯盟技術論壇、開設技術課程提供設備商之員工訓練、開放廠商諮詢時段、提供檢測服務等方式，將學校研究成果以及研發能量與產業界的需求融合在一起，透過使用端(Users)、製造端(Makers)、學者/專家三方的共同參與，進而強化國內先進自動化光學檢測相關設備廠商之實質參與度以及聯盟關係。<br> Abstract: The proposed project aims to develop a cohesive allay among the AOI R&D lab, the AOI makers and the AOI equipment users in Taiwan, for enforcing a strong development of AOI industries in advanced AOI and semiconductor manufacturing industries. According to the needs and specification by the AOI users, the R&D lab is targeting to further integrate its developed AOI technology and intellectual patents with the AOI equipment makers for the commercialization of AOI systems and techniques. Three important 3-D optical measuring techniques are targeted to develop in-situ AOI systems, such as advanced in-situ white light phase-scanning interferometers, high accuracy chromatic microscopic confocal microscopes and high speed Moir&eacute; projection 3-D surface profilometers. Meanwhile, the project is also aimed to develop a training program on core AOI techniques for enhancing the skills level of the researcher and engineers from the AOI makers; to run AOI technical workshop to promote the spread and cooperation of the developed advanced AOI techniques; to run AOI alley forum to promote important dialogs and communication between the alley members, so the demands from users can be realized by the alley effectively and efficiently.自動化光學檢測(AOI)半導體製程線上檢測精密量測光學量測.automated optical inspection (AOI)semiconductor manufacturing processesin-situ inspectionprecision metrologyoptical measurement.