Development of a low-cost micro-CMM for 3D micro/nano measurements

Fan, K. C.K. C.FanFei, Y. T.Y. T.FeiYu, X. F.X. F.YuChen, Y. J.Y. J.ChenWang, W. L.W. L.WangChen, F.F.ChenLiu, Y. S.Y. S.Liu2010-09-072018-06-282010-09-072018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/200090en-USDevelopment of a low-cost micro-CMM for 3D micro/nano measurementsjournal article