Kuo, Wen-ChengWen-ChengKuoCHENG-WEI CHEN2020-06-292020-06-292011https://scholars.lib.ntu.edu.tw/handle/123456789/506057Novel fabrication method for high-aspect-ratio suspended parylene structures.conference paper10.1109/NEMS.2011.6017423https://doi.org/10.1109/NEMS.2011.6017423