Modelling on dressing effects in chemical mechanical polishing with diamond dressers

Chen, K.-R.K.-R.ChenYoung, H.-T.H.-T.YoungHONG-TSU YOUNG2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-78651575751&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356881Modelling on dressing effects in chemical mechanical polishing with diamond dressersjournal article10.1504/IJAT.2010.032458