Wan, D.H.D.H.WanChen, H.L.H.L.ChenYu, C.C.C.C.YuLee, Y.C.Y.C.LeeHSUEN-LI CHEN2020-05-122020-05-122008https://scholars.lib.ntu.edu.tw/handle/123456789/491341In this study, we demonstrated the textured structure on silicon surface by metal assisted etching method, using Au nanoparticles as catalysts in HF and H2O2 solution. The size and density of the nanoparticles could be tuned easily. The porous layers filled with cylinder- or cone-shaped were uniformly formed by immersing the gold deposited silicon wafers in a mixed solution containing HF and H2O2 under different etching conditions. The optimized textured structure was close-packed pyramids-like surface in subwavelength scale and showed the lowest reflectance less than 0.5% over whole visible and near IR wavelengths. The large reduction of reflectance was attributed from the gradient refractive index of the silicon surface with the depth along the light propagation.Acidic wet etching; Antireflective layer; Gold nanoparticles; Silicon solar cells; Subwavelength textured surface[SDGs]SDG7Catalysis; Direct energy conversion; Gold; Metals; Nanoparticles; Nanostructures; Nonmetals; Optics; Photonics; Renewable energy resources; Silicon; Solar concentrators; Solar power plants; Solar radiation; Surface structure; Au nano-particles; Etching method; Self assembled nanoparticles; Silicon (0 0 1) surfaces; Solar energy systems; Sub wavelength; Solar energyconference paper10.1117/12.7812792-s2.0-47749135941https://www.scopus.com/inward/record.uri?eid=2-s2.0-47749135941&doi=10.1117%2f12.781279&partnerID=40&md5=d36b7462cb7b4f5c4274537e6a388cbc