Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrology

Yang, W.-T.W.-T.YangBlue, J.J.BlueRoussy, A.A.RoussyReis, M.M.ReisPinaton, J.J.PinatonJAKEY BLUE2020-03-022020-03-022018https://scholars.lib.ntu.edu.tw/handle/123456789/467298Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition: APC: Advanced process control; AM: Advanced metrologyconference paper10.1109/ASMC.2018.83731612-s2.0-85048864111https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048864111&doi=10.1109%2fASMC.2018.8373161&partnerID=40&md5=0e06856f526693d298ff912bfbfa3d30