Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry

Chen, L.-C.L.-C.ChenNguyen, X.-L.X.-L.NguyenHuang, H.-S.H.-S.HuangChen, J.-L.J.-L.ChenLIANG-CHIA CHEN2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/447871Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometryjournal article10.1109/TIE.2009.20366452-s2.0-76849099137https://www.scopus.com/inward/record.uri?eid=2-s2.0-76849099137&doi=10.1109%2fTIE.2009.2036645&partnerID=40&md5=d99def67c517f27712c9ff4b73209399