A measurement system for the geometric accuracy of X-Y stages in 6 d-o-f

范光照Chen, M.J.M.J.ChenFan, K. C.K. C.Fan2009-05-152018-06-282009-05-152018-06-281999-08http://ntur.lib.ntu.edu.tw//handle/246246/156426en-USA measurement system for the geometric accuracy of X-Y stages in 6 d-o-fconference paper