Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide

Wu, Jing-TangJing-TangWuChu, Ying-TaYing-TaChuYang, Sen-YeuSen-YeuYangLi, Chen-ChungChen-ChungLi2012-10-312018-06-282012-10-312018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/244230en-USLow-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxidejournal article10.1016/j.mee.2010.07.028http://ntur.lib.ntu.edu.tw/bitstream/246246/244230/-1/320.pdf